highest accuracy to test state-of-the-art substrate products
4 test heads and single sided test against vacuum plate
10 µm pad size and 25 µm pitch
max. product size 300 mm x 310 mm (11.8″ x 12.2″)
cameras with 1.2 µm Resolution per pixel
atg Luther & Maelzer launched the S3, which is able to test 10µm structures while achieving 100 measurements per second. The machine therefore provides the customer with an economical test solution for high end substrates. The S3 provides the highest accuracy with the best performance to test the latest technology of substrate boards. The S3 has a granite frame, which gives the best temperature stability. The high resolution cameras of 1.2 µm per pixel provide the functionality to automatically scan and test 10 µm structures reliably.
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