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S3 Flying Probe Substrate Test

Single Sided Tester for Substrate Boards

atg Luther & Maelzer launched the S3, which is able to test 10 µm structures while achieving 100 measurements per second. The machine therefore provides the customer with an economical test solution for high end substrates. The S3 provides the highest accuracy with the best performance to test the latest technology of substrate boards. The S3 has a granite frame, which gives the best temperature stability. The high resolution cameras of 1.2  µm per pixel provide the functionality to automatically scan and test 10  µm structures reliably.

Key Features

  • 4 Test Heads
  • Single sided test with vacuum table
  • High-speed direct linear drives for X and Z motion
  • No probe marks
  • Optical auto focus Microscope lenses
  • Cameras with 1.2  µm resolution per pixel
  • 10  µm pad size and 25  µm pitch
  • Fast 300 mA Kelvin testing
  • Test area 11.8″ x 12.2″ (300 mm x 310 mm)
S3

  • Test Heads
  • 4 linear motion, air bearing
  • Test Area
  • 11.8″ x 12.2″
    (610 mm x 620 mm)
  • Application
  • Single Sided
  • Smallest Pad Size
  • 10  µm (0.4 mil)
  • Smallest Pitch Size
  • 25  µm (1.0 mil)
© atg Luther & Maelzer 2021
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